By Ed Frankl

ASML Holding NV said Monday that a fire broke out inside a part of its Berlin factory overnight.

The fire was extinguished on Sunday night and no-one was injured, the Dutch semiconductor supplier said.

"At this point it is too early to make any statement on the damage or whether the incident will have any impact on the output plan for this year," ASML added.

The Eindhoven-based company said it will take a few days to conduct an investigation and make a full assessment.

ASML's Berlin site, part of its 2020 acquisition of Berliner Glas, manufactures components for lithography systems used to print patterns onto silicon wafers, the company said.

Shares at 1350 GMT were down 0.2%.

Write to Ed Frankl at edward.frankl@dowjones.com

(END) Dow Jones Newswires

January 03, 2022 09:12 ET (14:12 GMT)

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