BEVERLY, Mass., Nov. 15, 2021 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling
ion implantation solutions for the semiconductor industry,
announced today that it will showcase its Purion™ and GSD Ovation™
Series of ion implanters at the SEMICON Japan 2021
exhibition. The event, one of the most important technology
forums in the Asia Pacific region,
is being held December 15-17, at the
Tokyo Big Sight in Tokyo,
Japan. Axcelis will be located at Booth #5731.
Axcelis will showcase the Purion and GSD Ovation Series of ion
implanters at SEMICON Japan 2021, Visit Booth #5731.
Semiconductor manufacturers are invited to visit the Axcelis
exhibit to learn first-hand about innovative ion implant solutions
that deliver significant technology and manufacturing
advantages.
- Purion Series - The platform is designed with unique
enabling technologies to deliver the highest purity, precision and
productivity to meet the needs of today's most demanding High
Current, Medium Current and High Energy applications. This includes
the Purion Power Series™ - featuring Axcelis' innovative
solution for both silicon and silicon carbide (SiC) processing
across the full power device applications space.
- GSD Ovation Series - Based on the highly successful GSD
Series of implanters, the industry benchmark for the longest
manufactured and supported batch ion implanter, the new GSD Ovation
high current and high energy systems are designed to support the
growing 200mm new fab construction and expansion activity.
Innovative improvements, combined with a proactive continuous
improvement roadmap, enables the fastest and most cost effective
way to extend, optimize and sustain robust capability, while
delivering unmatched reliability and lowest cost of ownership.
Mary Puma, president and CEO of
Axcelis Technologies, said, "We are excited to be a part of this
important market, and to foster new opportunities to introduce the
Purion and GSD Ovation Series advanced ion implant technology to
Japanese chipmakers supporting the demand for growing power device,
image sensor and memory markets."
Naoyasu Yorita, Axcelis Country Manager, Japan, commented, "Japanese customers continue
to be very impressed by the broad product line offering and the
advanced capabilities provided by Axcelis` ion implant technology.
Axcelis is committed to working with its customers to provide
highly differentiated Purion products that solve their high value,
high impact emerging implant challenges."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for over 40 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
AXCELIS CONTACTS:
Japan:
Naoyasu Yorita (Country Manager) +81.3.5860.2586
ROW:
Maureen Hart (editorial/media)
+1.978.787.4266
Doug Lawson (investor relations)
+1.978.787.9552
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SOURCE Axcelis Technologies, Inc.