PORTLAND, Oregon, July 2, 2015 /PRNewswire/ --
Picosun Oy, the leading provider of high quality Atomic Layer
Deposition (ALD) solutions for industrial manufacturing, and
Carleton University, Canada, report uniform ALD gold deposition on
complete silicon wafers. The gold films were prepared using
PICOSUN™ plasma ALD tool and a new gold precursor developed by
Prof. Seán Barry. The novel process was described in the talk given
at the AVS 15th ALD meeting held in Portland, USA.
Gold is a highly sought-after material in today's microelectronics,
optoelectronics, and microsystems manufacturing. Due to its
excellent chemical inertness and high thermal and electrical
conductivity it has a plethora of applications for example in 3D
packaging (via interconnects), wafer metallization, and heat
dissipation of IC components, and preparation of electrical
connections, structural layers, and electrodes for MEMS
devices.
"We have worked on gold metal deposition chemistry for a few years
now, and this process is a breakthrough. Our PICOSUN™ ALD system
handles a wide variety of precursors beautifully, and its ease of
use has made process development for challenging materials much
easier. The uniformity that we are able to achieve with the
PICOSUN™ plasma ALD tool is very impressive," states Seán Barry,
Associate Professor of the Department of Chemistry, Carleton University, Ottawa, Canada.
"We are excited about these recent advances in gold deposition by
ALD. Picosun's plasma ALD technology is optimal for metal
deposition. This has enabled gold manufacturing also before, but
the now published, larger scale results will definitely catch the
interest of a vast number of our production customers in IC, MEMS,
and electronics industries," summarizes Dr. Wei-Min Li, Applications Director of
Picosun.
Picosun provides the most advanced ALD thin film technology and
enables the industrial leap into the future by novel, cutting-edge
coating solutions, with four decades of continuous expertise in the
field. Today, PICOSUN™ ALD systems are in daily production use in
numerous major industries around the world. Picosun is based in
Finland, with subsidiaries in USA,
China, Taiwan, and Singapore, and a world-wide sales and support
network.
Located in the nation's capital, Carleton University is a dynamic research and
teaching institution with a tradition of leading change. Its
internationally recognized faculty, staff and researchers provide
more than 27,000 full- and part-time students from every province
and more than 100 countries around the world with academic
opportunities. Carleton's creative, interdisciplinary
and international approach to research has led to many significant
discoveries and creative works in science and technology, business,
governance, public policy and the arts. As an innovative
institution, Carleton is uniquely committed to developing solutions
to real-world problems.
CONTACT: Dr. Wei-Min Li,
+358-50-321-1955, wei-min.li@picosun.com