Bruker Announces Order for D8 FABLINE and D8 DISCOVER X-ray Metrology Tools from SEMATECH at UAlbany NanoCollege
08 July 2009 - 9:30PM
Business Wire
Bruker AXS, the market leader in X-Ray Diffraction (XRD)
instrumentation, is pleased to announce that SEMATECH, the global
consortium of semiconductor chip-makers, has ordered the Bruker
X-ray tools D8 FABLINE� and D8 DISCOVER� for the
X-ray metrology site at the College of Nanoscale Science and
Engineering (CNSE) of the University at Albany. This new suite of
equipment provides SEMATECH�s metrology program at CNSE�s Albany
NanoTech Complex with lab-to-fab X-ray metrology development
capability to address the challenges of advanced semiconductor
process control and new materials characterization.
The D8 FABLINE provides fully automated handling of 300mm
wafers under Class 1 clean room conditions. It provides a wide
spectrum of techniques, such as rapid X-ray reflectivity (XRR),
grazing incidence X-ray diffraction (GID), and high-resolution
X-ray diffraction (HR-XRD) in order to facilitate advanced process
development and control on strained devices and high-K thin films,
as well as materials characterization for future generation
technology nodes.
The D8 DISCOVER is a multi purpose X-ray diffraction
platform, designed for high performance materials research and
methodology development. The system features the state-of-the-art
technology, including the capability to perform in-plane grazing
incidence diffraction (IP-GID). New methodologies developed on this
laboratory platform will be directly portable to the D8
FABLINE tool to facilitate implementation in the fabs.
Dr. Brad Thiel, CNSE Associate Professor of Nanoscience and
Director of SEMATECH�s Advanced Metrology Development Program at
the UAlbany NanoCollege, said, �The purchase of Bruker�s
state-of-the-art XRD systems, combined with the R&D
capabilities and know-how of both SEMATECH and CNSE, will bring
significant benefits to nanoelectronics manufacturers by
pinpointing device failures and improving advanced process control.
The addition of these cutting-edge tools provides enhanced
resources at CNSE�s Albany NanoTech to support the critical needs
of our global corporate partners and the nanoelectronics
industry.�
Dr. Assunta Vigliante, Bruker AXS Business Development Manager
for Semiconductor Solutions, commented: �We are pleased and proud
to be working with SEMATECH on X-ray metrology solutions for future
technology nodes. Since SEMATECH represents many of the leading
worldwide semiconductor manufacturers, this is an important
opportunity for Bruker to enable innovation and provide broad
support for the global semiconductor industry. As X-ray metrology
becomes an important technology in the semiconductor industry,
Bruker is committed to providing reliable world-class solutions for
the industry�s analytical and metrology challenges. We look forward
to a long-term collaboration.�
About SEMATECH:
For over 20 years, SEMATECH� (www.sematech.org) has set global
direction, enabled flexible collaboration, and bridged strategic
R&D to manufacturing. Today, SEMATECH continues accelerating
the next technology revolution with its nanoelectronics and
emerging technology partners.
About Bruker AXS:
For more information about Bruker AXS and Bruker Corporation
(NASDAQ: BRKR), please visit www.bruker.com.
About CNSE. The UAlbany CNSE is the first college in the
world dedicated to education, research, development, and deployment
in the emerging disciplines of nanoscience, nanoengineering,
nanobioscience, and nanoeconomics. CNSE�s Albany NanoTech Complex
is the most advanced research enterprise of its kind at any
university in the world. With over $5 billion in high-tech
investments, the 800,000-square-foot complex attracts corporate
partners from around the world and offers students a one-of-a-kind
academic experience. The UAlbany NanoCollege houses the only
fully-integrated, 300mm wafer, computer chip pilot prototyping and
demonstration line within 80,000 square feet of Class 1 capable
cleanrooms. More than 2,500 scientists, researchers, engineers,
students, and faculty work on site at CNSE�s Albany NanoTech, from
companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba,
Applied Materials, Tokyo Electron, ASML, Vistec Lithography and
Atotech. For more information, visit www.cnse.albany.edu.
Photos/Multimedia�Gallery Available:
http://www.businesswire.com/cgi-bin/mmg.cgi?eid=6002514&lang=en
Bruker (NASDAQ:BRKR)
Historical Stock Chart
From Jun 2024 to Jul 2024
Bruker (NASDAQ:BRKR)
Historical Stock Chart
From Jul 2023 to Jul 2024