Bruker Announces $10M in New Orders for Novel Metrology Tools from Leading Semiconductor Manufacturer
12 May 2011 - 9:00PM
Business Wire
Bruker today announces new order bookings for multiple Bruker
tools from a leading global semiconductor foundry, totaling over
$10 million. Bruker is providing a variety of high-performance
semiconductor metrology systems, ranging from fully automated
InSight™ 3D atomic force microscopes, D8
FABLINE™ and D8 DISCOVER™ X-ray diffraction systems to
S2 PICOFOX™ portable bench-top TXRF spectrometers. This
combination of industry-leading metrology technology and front- to
back-end fab flexibility brings many R&D and QC benefits to
nanoelectronics manufacturers, as the industry pursues sub-32
nanometer capabilities.
“These recent orders are a validation of the synergy we
anticipated with our inclusion in the Bruker family,” said Dean
Dawson, Sr. Director for Product Line Management of Bruker’s AFM
business. “We are pleased that the InSight 3D-AFM is
continuing its acceptance in semiconductor fabs. With its accurate,
inline, three-dimensional, 22-nanometer measurement capabilities,
the InSight is enabling semiconductor manufacturers to
reduce their process development times for advanced technology
nodes and shorten their time to market.”
“This is an opportunity for Bruker to support the semiconductor
industry’s increasing adoption of X-ray metrology as a crucial
technology for present and future technology nodes,” added Assunta
Vigliante, Ph.D., Bruker AXS Head of Business Development for the
Semiconductor Industry. “Bruker’s D8 products pinpoint
device failures, while providing important lab-to-fab X-ray
metrology capabilities to address advanced semiconductor process
control and new materials characterization.”
About InSight 3DAFM
The InSight 3DAFM provides non-destructive,
high-resolution three-dimensional measurements of critical
32-nanometer semiconductor features to determine CD, sidewall
angle, and line width roughness on critical layers, including Gate
and FinFet structures. The system contains a high-precision X-Y
stage with superior accuracy and a unique pattern recognition
system with high-precision laser auto-focus capability. In
addition, new AFM control techniques and proprietary probe designs
enable improved precision, lower cost per measurement site, and
smaller feature measurements. Finally, system reliability is
significantly enhanced to meet the demands of 45nm and below
production-based metrology.
About D8 FABLINE and D8 DISCOVER
The D8 FABLINE provides fully automated handling of 300mm
wafers under Class 1 clean room conditions. It provides a wide
spectrum of techniques, such as rapid X-ray reflectivity (XRR),
grazing incidence X-ray diffraction (GID), and high-resolution
X-ray diffraction (HR-XRD) in order to facilitate advanced process
development and control on strained devices and high-K thin films,
as well as materials characterization for future generation
technology nodes. The D8 DISCOVER is a multi-purpose X-ray
diffraction platform, designed for high-performance materials
research and methodology development. The system features
state-of-the-art technology, including capabilities for in-plane
grazing incidence diffraction (IP-GID).
About Bruker Corporation (NASDAQ: BRKR):
Bruker Corporation is a leading provider of high-performance
scientific instruments and solutions for molecular and materials
research, as well as for industrial and applied analysis. For more
information, please visit www.bruker.com.
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describe historical facts may constitute forward-looking statements
as that term is defined in the Private Securities Litigation Reform
Act of 1995. Any forward-looking statements contained herein are
based on current expectations, but are subject to risks and
uncertainties that could cause actual results to differ materially
from those projected, including, but not limited to, risks and
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other factors are identified and described in more detail in our
filings with the SEC, including, without limitation, our annual
report on Form 10-K for the year ended December 31, 2010, our most
recent quarterly reports on Form 10-Q and our current reports on
Form 8-K. We expressly disclaim any intent or obligation to update
these forward-looking statements other than as required by law.
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