Air Products Signs Sole License Agreement with Fujifilm Electronic Materials USA for PDEMS(TM) ILD Process
18 July 2007 - 3:00AM
PR Newswire (US)
Agreement Provides Multiple PDEMS Sourcing Options to Low-k Market
LEHIGH VALLEY, Pa., July 17 /PRNewswire/ -- Air Products (NYSE:APD)
and Fujifilm Electronic Materials U.S.A., Inc. today announced that
they have signed a sole licensing agreement for the Air Products'
patented PDEMS(TM) interlayer dielectric (ILD) Process. The
technology is designed to make a porous low-k dielectric material
by plasma-enhanced chemical vapor deposition (PECVD). The license
agreement allows Fujifilm to supply the materials to semiconductor
manufacturers that make use of Air Products' patented PDEMS(TM) ILD
Process. The PDEMS(TM) ILD Process, developed by Air Products, is a
breakthrough process for making a porous low-k dielectric material
by PECVD. As claimed in US Patent numbers 6,583,048 and 6,846,515,
the organosilicate structure of the film is created using a
diethoxymethylsilane precursor, referred to as a "structure
former." Pores are imparted to the film by employing a
hydrocarbon-based precursor known as a "porogen" that co-deposits
during the growth of the film. Pores are created by removing the
porogen using various post-treatment processes. Under the license
agreement, Air Products will continue to sell DEMS(TM)
(diethoxymethylsilane) and porogens for use in the PDEMS(TM) ILD
Process. Fujifilm Electronic Materials U.S.A. will sell its own
D-MEOS(TM) (diethoxymethylsilane) and porogens for use in the
PDEMS(TM) ILD Process. Both companies will interface directly with
customers in selling the precursors used in the patented process.
"Our customers have challenged material suppliers to step up and
help them continue the historical rate of roadmap progress. The
creation of Air Products' PDEMS(TM) ILD Process is a response to
this challenge," said Corning Painter, vice president of
Electronics, for Air Products. "Our agreement with Fujifilm is a
commitment by Air Products and Fujifilm to provide semiconductor
manufacturers the ability to easily access this material technology
anywhere in the world." "Fujifilm is committed to partnering with
our customers to ensure that they have the enabling materials and
processes they need to foster greater innovation," said Keiji
Mihayashi, President and CEO of FUJIFILM Electronic Materials
U.S.A, Inc. "In addition to our existing broad product lines
already supporting the semiconductor manufacturing and electronic
materials markets, this license will allow for a new level of
collaboration with our customers and OEM partners." About Air
Products Air Products (NYSE:APD) serves customers in industrial,
energy, technology and healthcare markets worldwide with a unique
portfolio of atmospheric gases, process and specialty gases,
performance materials, and equipment and services. Founded in 1940,
Air Products has built leading positions in key growth markets such
as semiconductor materials, refinery hydrogen, home healthcare
services, natural gas liquefaction, and advanced coatings and
adhesives. The company is recognized for its innovative culture,
operational excellence and commitment to safety and the environment
and is listed in the Dow Jones Sustainability and FTSE4Good
Indices. The company has annual revenues of $9 billion, operations
in over 40 countries, and over 20,000 employees around the globe.
For more information, visit http://www.airproducts.com/. About
Fujifilm FUJIFILM Electronic Materials U.S.A. Inc. is a wholly
owned subsidiary of FUJIFILM Corporation, with regional
headquarters in Japan, United States and Belgium and several
manufacturing and R&D facilities located worldwide. The company
supplies advanced technology chemistry and delivery equipment to
the semiconductor and flat panel display fabrication market.
FUJIFILM Corporation brings continuous innovation and leading-edge
products to a broad spectrum of industries including medical, life
sciences, consumer electronic, chemical, graphic arts, information
systems, photography and office products based on its vast
portfolio of digital, optical, fine chemical and thin film coating
technologies. It was ranked number 15 for U.S. patents granted in
2006, employs more than 75,000 people worldwide and in the year
ended March 31, 2007, had global revenues of $23.6 billion.
Fujifilm ADRs (American Depository Receipts) are traded in the U.S.
on the NASDAQ exchange (NASDAQ:FUJI). For more information, please
visit http://www.fujifilmholdings.com/. ***NOTE: This release may
contain forward-looking statements. Actual results could vary
materially, due to changes in current expectations. DATASOURCE: Air
Products and Chemicals, Inc. CONTACT: Media, Robert Brown,
+1-610-481-1192, , or Investors, Nelson Squires, +1-610-481-7461, ,
both of Air Products and Chemicals, Inc. Web site:
http://www.airproducts.com/ http://www.fujifilmholdings.com/
Copyright
Fujifilm Holdings (MM) (NASDAQ:FUJI)
Historical Stock Chart
From Oct 2024 to Nov 2024
Fujifilm Holdings (MM) (NASDAQ:FUJI)
Historical Stock Chart
From Nov 2023 to Nov 2024