Bruker Nano Attains Atomic Resolution with N8 TITANOS™ Large Sample Atomic Force Microscope (AFM)
08 December 2009 - 11:00PM
Business Wire
Bruker Nano today announced that its N8 TITANOS™ large-sample
inspection AFM has been further improved to provide highest spatial
resolving power. Due to its unique AFM technology and outstanding
mechanical stability, the TITANOS has now been demonstrated with
atomic-scale resolution on HOPG (highly oriented pyrolythic
graphite) on a production instrument in standard configuration. The
TITANOS has proven itself once again as the most precise and stable
AFM platform for large samples up to 300 mm diameter.
The N8 TITANOS has been developed for the inspection of 300 mm
wafers, and it is also in use for metrology on solar panels,
photolithography masks, flat panel displays, etc. The TITANOS’
ultra-precise xy-positioning stage employs contact-less linear
motors, high-resolution glass encoders and an air bearing for fast,
reproducible sample movement. The TITANOS AFM is mounted on a solid
granite bridge above the platform.
All AFM systems offered by Bruker Nano employ Fiber Optic
Interferometry (FOI) detection as a unique feature to achieve
outstanding resolution even on large samples. “FOI provides
superior sensitivity as well as a calibrated deflection,” explains
Dr. Hans Achim Fuss, Bruker Nano’s AFM Chief Technology Officer.
“The results obtained with our AFMs are highly reproducible due to
the exact knowledge of all crucial parameters.”
Dr. Frank Saurenbach, Vice President for AFM at Bruker Nano
commented further: “It is incredible to see the TITANOS’ stage move
hundreds of millimeters in seconds, and then operate with such
stability and record resolution at each new measuring position. We
are excited to supply the large sample AFM tool with the highest
resolving power available on the market”.
The N8 TITANOS can be used as a stand-alone, automated system or
combined with a high-performance optical microscope. It comes as a
fully accessible R&D tool, or can be upgraded to an at-line
production inspection system.
About Bruker Nano
Buker Nano is a business unit of the Bruker AXS division. For
more information about Bruker Nano and Bruker Corporation (NASDAQ:
BRKR), please visit www.bruker.com
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