Bruker’s New AcuityXR Technology Breaks Diffraction Limit
30 November 2010 - 7:35AM
Business Wire
Bruker Corporation (NASDAQ: BRKR) announced today at the
Materials Research Society (MRS) Fall 2010 Meeting the
AcuityXR™, a novel optical surface profiler mode that
combines unique, patent-pending Bruker hardware and software
technology to enable select ContourGT™ non-contact, 3D
optical surface profilers to break the optical diffraction limit
and deliver lateral resolutions that were previously considered
impossible to achieve.
Many nanoscale applications in the semiconductor, medical and
precision machining fields today have surface features and defects
with dimensions that limit detection or identification due to the
optical diffraction limit. Such miniscule features and defects
often directly affect function, performance, quality and/or
manufacturing yields and are of great interest to researchers and
production QA/QC personnel alike. Bruker optical surface profiler
systems equipped with the new AcuityXR mode have shown
resolution of features below 130 nanometers in width, which is
unprecedented in optical microscopy and is nearly three times finer
than for systems without this technology. Furthermore,
AcuityXR enables this new level of precision while
preserving the wide field-of-view and high performance benefits of
Bruker non-contact, 3D optical surface profiling. With
AcuityXR, dimensional repeatability on narrow structures has
been shown to improve by more than a factor of 5x, showing a true
metrology benefit to the technology in addition to its ability to
reveal exceptionally fine features. AcuityXR is an optional
capability that is now available on Bruker ContourGT-K1,
X3 and X8 optical surface profilers.
“AcuityXR combines radically new measurement algorithms
with the enhanced metrology hardware technology in the
ContourGT-K1, X3 and X8 systems that together
deliver lateral resolutions never before achieved in optical
microscopy,” said Mr. Ross Q. Smith, Vice President and General
Manager of Bruker’s Stylus & Optical Metrology Unit. “This
remarkable new capability, which is exclusively available on
ContourGT systems, is a great benefit to both our current
and prospective customers in semiconductor, medical and precision
machining applications where feature sizes are shrinking while the
need for quality is continuously increasing.”
Dr. Mark R. Munch, President of the Bruker Nano Surfaces
Business, added: “AcuityXR builds upon the industry-leading
performance, repeatability and ease-of-use capabilities of the
ContourGT product family. Bringing this unprecedented
achievement to market truly illustrates Bruker’s on-going
commitment to provide the highest value nanosurface metrology
systems to our industrial and R&D customers.”
AcuityXR and ContourGT at the MRS 2010 Fall Meeting
ContourGT systems equipped with AcuityXR will be
demonstrated at the Bruker Nano Surfaces Booth (No. 300) at the MRS
Fall Meeting held at the Hynes Convention Center in Boston, MA,
November 30 through December 2. Bruker will be conducting a seminar
on AcuityXR and other advanced optical surface measurement
modes on Tuesday, November 30 at 6:30 PM in the Sheraton Boston
Hotel, 3rd Floor, Beacon G.
About the ContourGT Family
Introduced earlier in 2010, the ContourGT family of
non-contact, 3D optical surface profilers features Bruker-patented,
high-brightness dual-LED illumination that, when combined with the
system’s superior vertical resolution, greatly improves sensitivity
and stability and enables precision non-contact 3D surface
metrology in difficult applications and environments that are
challenging for other WLI-based systems. The ContourGT also
features the new Bruker-developed and patent-pending
Vision64™ operating and analysis software and the industry’s
most intuitive, modular user interface that provides
user-level-customization capabilities for a wide range of surface
profiling metrology applications. For more information on
AcuityXR or the ContourGT, or to schedule a demo,
please call +1 (520) 741-1044 ext. 3, email
productinfo@bruker-nano.com or visit
www.bruker-axs.com/contourgt_optical_profilers.html.
About Bruker Corporation
Bruker Corporation is a leading provider of high-performance
scientific instruments and solutions for molecular and materials
research, as well as for industrial and applied analysis. For more
information about Bruker Corporation, please visit
www.bruker.com.
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