LEHIGH VALLEY, Pa.,
Sept. 23, 2015 /PRNewswire/ -- Air
Products (NYSE: APD) will feature its advanced copper barrier
slurries for the electronics industry at the International
Conference on Planarization Technology (ICPT), being held at the
Wild Pass Horse Hotel & Casino in Chandler, Ariz., from September 30-October 2.
As part of the conference's Technical Sessions, Air Products
will present a paper titled "Attributes of an Advanced Node
Copper Barrier Slurry" on Wednesday,
September 30, at 9:35 a.m. in
the Ironwood Room. The work highlights a new barrier slurry
formulation that significantly boosts overall removal rates through
the use of chemical additives combined with an optimized abrasive,
resulting in increased removal rates and reduced defects compared
to current commercial offerings.
"As a result of this research, post barrier CMP planarity,
specifically density array erosion, is improved by varying the
specific barrier slurry removal rate ratios in a controllable
fashion," said Jim Schlueter, Air
Products' advanced barrier technology manager, who is presenting
the technical paper. "Compared to existing products, the new
barrier slurries offer major improvements in demonstrating
significant array erosion improvement and provide device makers
tunability and enhanced planarity, along with reduced defects,"
added Schlueter.
In addition to the technical paper, Air Products will also
participate in the following poster sessions at ICPT.
- "Improved Performance of Air Product STI2100TM Calcined Ceria
Slurry for Advanced Node Applications"
- "Low Dishing Cu CMP Slurries for Advances Node
Applications"
- "Advanced High Rate, Neutral pH Tungsten Slurries"
- "Post-STI CMP Buff Cleaning to Reduce Defectivity"
ICPT conference attendees are invited to meet with an Air
Products scientist or representative in Chandler to discuss their specific challenges
with CMP or post CMP cleans. To schedule a meeting during the
conference, please click here.
Air Products is a leading supplier of specialty gases and
chemicals, bulk gases, and delivery equipment and services to the
global electronics industry. For information about Air Products'
complete portfolio of gases, equipment and technology solutions for
the electronics industry, call 1-800-654-4567 (outside the U.S.
610-706-4730), or visit www.airproducts.com/electronics.
About Air Products
Air Products (NYSE:APD) is a leading industrial gases company. For
nearly 75 years, the company has provided atmospheric, process and
specialty gases, and related equipment to manufacturing markets
including metals, food and beverage, refining and petrochemical,
and natural gas liquefaction. Air Products' materials technologies
segment serves the semiconductor, polyurethanes, cleaning and
coatings, and adhesives industries. Over 20,000 employees in
50 countries are working to make Air Products the world's
safest and best performing industrial gases company, providing
sustainable offerings and excellent service to all customers. In
fiscal 2014, Air Products had sales of $10.4
billion and was ranked number 276 on the Fortune 500 annual
list of public companies. For more information, visit
www.airproducts.com.
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SOURCE Air Products