Advanced Energy® Showcases High Voltage Technologies at SEMICON® West
12 July 2016 - 10:30PM
Advanced Energy Industries, Inc. (Nasdaq:AEIS), the world leader in
precision power conversion, will dedicate its exhibit space at
SEMICON® West exclusively to a high voltage lineup that offers
improved semiconductor tool process resolution, accuracy and
stability. These enabling high voltage products will include
high-performance ion beam technologies for ion implantation,
precision e-beam technologies for SEM (scanning electron
microscope) tools and high-performance electrostatic chuck (e-chuck
or ESC) technologies for wafer manufacturing.
Advanced Energy® (AE®) will feature the OLS10K, EG353 and FLHV
models, delivering impressive performance and a host of advantages
for critical processes to improve tool performance and, ultimately,
increase throughput and yield.
- The rugged HiTek Power® OLS10K single-output high voltage power
supplies for ion implantation manage excessive arcing conditions to
achieve exceptionally high performance.
- The accurate and reliable 35 kV HiTek Power EG353 series for
precision SEM e-beam applications maximizes image quality and
repeatability.
- The stable UltraVolt® FLHV series provides power for the strong
force of e-chucks with advanced controls and monitoring as well as
floating (isolated) unipolar/bipolar high voltage outputs.
“For more than 35 years, AE has offered leading RF and DC
process power technologies essential for semiconductor
manufacturing,” said Yuval Wasserman, president and chief executive
officer of Advanced Energy. “Our display at SEMICON West this year
focuses exclusively on our high voltage technologies—a perfect
complement to our process power line. It highlights unique
capabilities in three different areas that enable our OEM customers
to continue to innovate and evolve the industry.”
Since 1981, Advanced Energy has provided leading technologies
that enable its customers to innovate. In 2014, the company added
high voltage to its technology portfolio through the acquisition of
UltraVolt, Inc., and HiTek Power Ltd., each with a rich history of
more than 40 years. The result has been a combined high voltage
offering of modules, racks and custom solutions for a range of OEM
and end-user applications from a single, world-class supplier.
SEMICON West will take place at the Moscone Convention Center in
San Francisco, July 12 – 14. AE will display its advanced high
voltage technologies in the South Hall A, booth 2108, where
researchers, process engineers and other innovators are encouraged
to visit and share their ideas and breakthroughs.
About Advanced Energy
Advanced Energy (Nasdaq:AEIS) is a global leader in innovative
power and control technologies for high-growth, precision power
solutions for thin films processes and industrial applications.
Advanced Energy is headquartered in Fort Collins, Colorado, with
dedicated support and service locations around the world. For more
information, go to www.advanced-energy.com.
CONTACT:
Carol Anderson-Reinhardt
Marketing Communications Manager
Advanced Energy Industries, Inc.
+1.970.407.6894
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