Ultra-Clean purification technology removes metals from
solvents used in advanced semiconductor photolithography
processes
BILLERICA, Massachusetts,
Feb. 28, 2017 /PRNewswire/ --
Entegris Inc. (NASDAQ: ENTG), a leader in specialty chemicals and
advanced materials handling solutions for the microelectronics
industry, today introduced Purasol™, a first-of-its-kind solvent
purifier that removes a wide variety of metal microcontaminants
found in organic solvents used in ultraclean chemical manufacturing
processes.
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Using uniquely tailored membrane technology, the new versatile
purifier can efficiently remove both dissolved and colloidal metal
contaminants from a wide variety of ultra-pure, polar and non-polar
solvents.
"As sensitivities to metal contaminants rise, photochemical
manufacturers are looking for new technology solutions to address
the wide variety of defect-causing contaminants that are harder and
more costly to control," said Entegris Senior Vice President of
Microcontamination Control, Clint
Haris. "In our ongoing efforts to develop ultraclean
solutions to these challenges, we have developed a novel membrane
technology that efficiently removes these critical
contaminants."
Compatible with most solvents, including difficult-to-remove
ketones like cyclohexanone, Purasol purifiers deliver superior
cleanliness with exceptional critical metals-removal capabilities
with single- or subparts-per-trillion contaminant levels removal
performance. Two product options are available to target different
solvent polarities (polar and nonpolar) in the removal of metals
known to cause defects in photolithography applications.
For more information on Purasol purifiers, please visit the
Entegris booth at SPIE Feb. 28 –
March 1, 2017, or go to
www.entegris.com/purasol.
About Entegris
Entegris is a leader in specialty chemicals and advanced
materials solutions for the microelectronics industry and other
high-tech industries. Entegris is ISO-9001 certified and has
manufacturing, customer service and/or research facilities in
the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South
Korea and Taiwan.
Additional information may be found at www.entegris.com.
Company Contact:
Andrew DePoy
Brand & Marcom Manager
T +1 480-290-8748
andrew.depoy@entegris.com
Media Contact:
Lora Martinez
Impress Labs
T: +1 303-941-6110
lora@impresslabs.com
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