Collaboration provides robust chemical supply chain for
global chipmakers using the breakthrough technology and supports
R&D for next-generation EUV applications
SAN
FRANCISCO, July 12, 2022 /PRNewswire/ -- SEMICON
WEST 2022 -- Lam Research Corp. (NASDAQ: LRCX), Entegris,
Inc. (NASDAQ: ENTG), and Gelest, Inc, a Mitsubishi Chemical Group
company, today announced a strategic collaboration that will
provide semiconductor manufacturers worldwide with reliable access
to precursor chemicals for Lam's breakthrough dry photoresist
technology for extreme ultraviolet (EUV) lithography, an innovative
approach used in the production of next-generation semiconductors.
The parties will work together on EUV dry resist technology
research and development (R&D) for future device generations of
logic and DRAM products that will help enable everything from
machine learning and artificial intelligence to mobile devices.
A robust supply chain for process chemicals is critical to EUV
dry resist technology integration into high-volume manufacturing.
This new long-term collaboration further broadens the growing
ecosystem for dry resist technology and will provide dual-source
supply from semiconductor material leaders with provisions for
continuity of delivery in all global markets.
In addition, Lam, Entegris, and Gelest will work together to
accelerate the development of future cost-effective EUV dry resist
solutions for high numerical aperture (high-NA) EUV patterning.
High-NA EUV is widely seen as the patterning technology that will
be required for continued device scaling and advancement of
semiconductor technology over the coming decades. Dry resist
provides the high etch resistance and tunable thickness scaling of
deposition and development necessary to support high-NA EUV's
reduced depth of focus requirements.
"Dry resist technology is a breakthrough that shatters the
biggest barriers to scaling to future DRAM nodes and logic with EUV
lithography," said Rick Gottscho,
executive vice president and chief technology officer of Lam
Research. "This collaboration brings together Lam's dry resist
expertise and cutting-edge solutions with material science
capabilities and trusted supply channels from two industry
precursor chemical leaders. This important expansion of the dry
resist ecosystem paves the way for exciting new levels of
innovation and high-volume manufacturing with the technology."
First developed by Lam in collaboration with ASML and IMEC,
dry resist extends the resolution, productivity, and yield of EUV
lithography, thereby addressing key challenges associated with
creation of next-generation DRAM and logic technologies. It
provides superior dose-to-size and dose-to-defectivity performance,
enabling higher EUV scanner productivity and lower cost of
ownership. In addition, Lam's dry resist process offers key
sustainability benefits by consuming less energy and five to ten
times less raw materials than traditional resist processes.
"Lam's dry resist approach reflects key innovations at the
material level and offers a wide range of advantages, including
better resolution, improved cost-efficiency and compelling
sustainability benefits," said Bertrand
Loy, chief executive officer of Entegris. "We are proud to
be a part of this innovative collaboration to accelerate dry resist
adoption and to be a trusted process materials supplier for
customers as they push to create the next generation of
semiconductors with this important technology."
"Our collaboration with Lam and Entegris to advance dry resists
for EUV lithography demonstrates our commitment to support
chipmakers as they innovate in materials science," said
Jonathan Goff, president of Gelest,
a Mitsubishi Chemical Group company. "We've seen EUV demonstrate
exceptional value in recent years, and we're pleased to be part of
the growing ecosystem to extend its potential."
About Lam Research
Lam Research Corporation is a global supplier of innovative
wafer fabrication equipment and services to the semiconductor
industry. Lam's equipment and services allow customers to build
smaller and better performing devices. In fact, today, nearly every
advanced chip is built with Lam technology. We combine superior
systems engineering, technology leadership, and a strong
values-based culture, with an unwavering commitment to our
customers. Lam Research (Nasdaq: LRCX) is a FORTUNE 500® company
headquartered in Fremont, Calif.,
with operations around the globe. Learn more at
www.lamresearch.com. (LRCX-T)
About Entegris
Entegris is the global leader in electronic materials for the
semiconductor market. With approximately 8,800 employees across its
global operations, Entegris offers the industry's most
comprehensive and innovative unit-driven end-to-end offering for
semiconductor customers, in addition to solutions for the life
sciences and other advanced manufacturing environments. Entegris'
solutions help customers improve their performance, productivity
and yields to enable technologies that transform the world. It has
manufacturing, customer service, and/or research facilities in
the United States, Canada, China, France, Germany, Israel, Japan, Malaysia, Singapore, South
Korea, and Taiwan. For more
information about Entegris, visit us at www.entegris.com, or follow
us on LinkedIn, Twitter, Facebook, and Instagram.
About Gelest
Gelest is a U.S.-based innovator, manufacturer, and global
supplier of specialty silicones, organosilanes, metal-organics, and
acrylate monomers that serves advanced technology end markets
including medical devices, life sciences, coatings and adhesives,
microelectronics, and personal care. As a Mitsubishi Chemical Group
company, Gelest can leverage the expertise, research and
development support, and resources of one of the world's largest
and most successful chemical companies. Gelest helps contribute to
customer success by developing cutting edge chemical technology,
products, and services to address society's most complex material
science challenges.
Caution Regarding Forward-Looking
Statements
Statements made in this press release that are
not of historical fact are forward-looking statements and are
subject to the safe harbor provisions created by the Private
Securities Litigation Reform Act of 1995. Such forward-looking
statements relate to but are not limited to: the ability of Lam,
Entegris and Gelest to supply tools and chemicals in sufficient
quantity and quality and in a sufficiently timely manner to meet
customer demands; the duration of, goals of or results delivered by
the collaboration of the parties; the performance of Lam's tools
and processes and, specifically, the performance and advantages
obtained through the use of Lam's dry resist technology; the effect
of that new technology on the cost and productivity of EUV
lithography; the need for improvements to the productivity and
resolution of EUV lithography; the amount of energy or raw material
saved by use of the new technology; and the benefits of industry
collaborations. These statements are based on current expectations
and are subject to risks, uncertainties, and changes in condition,
significance, value, and effect including those risks and
uncertainties that are described in the documents filed or
furnished by us with the Securities and Exchange Commission,
including specifically the Risk Factors described in Lam's annual
report on Form 10-K for the fiscal year ended June 27, 2021, and quarterly report on Form 10-Q
for the quarter ended March 26, 2022
and in Entegris' annual report on Form 10-K for the fiscal year
ended December 31, 2022, and
quarterly report on Form 10-Q for the quarter ended April 2, 2022. These uncertainties and changes
could materially affect the forward-looking statements and cause
actual results to vary from expectations in a material way. Neither
company undertakes an obligation to update the information or
statements made in this release.
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SOURCE Lam Research Corporation