Altis Semiconductor Selects Mykrolis Fluorogard RS(R) Product Line for Photoresist Stripping and Polymer Removal Applications
28 June 2004 - 11:30PM
PR Newswire (US)
Altis Semiconductor Selects Mykrolis Fluorogard RS(R) Product Line
for Photoresist Stripping and Polymer Removal Applications
High-Capacity Filtration Technology Extends Filter Lifetime,
Maximizing Total Filtration Volume and System Uptime Billerica,
Mass., June 28 /PRNewswire-FirstCall/ -- Mykrolis Corporation
(NYSE:MYK), a leading supplier of components and subsystems to the
semiconductor industry, today announced that Altis Semiconductor, a
wafer fab company which manufactures devices down to 0.13(mu)m and
specializes in manufacturing state of the art electronic
components, has qualified Fluorogard(R) RS product line for
photochemical stripping. Altis will be using Mykrolis's Fluorogard
RS filters at their facility in France, one of the largest
semiconductor device manufacturing plants in Europe. During a
photochemical stripping process evaluation of the Mykrolis
Fluorogard RS product line, the performance of the Fluorogard RS-M,
in particular, exceeded expectations. The Fluorogard RS-M filter
achieved a filter time of two months -- four times longer that of
the previous filter, and significantly reduced tool downtime caused
by bath contamination. "We are pleased that Altis Semiconductor has
recognized and will benefit from the improved filtration technology
of our Fluorogard RS product line," said Randy Broomhall-Dillard,
product manager at Mykrolis. Mykrolis's Fluorogard RS filters
provide ultimate protection from films, gels, and hard-particle
contaminants encountered in photoresist-stripping and polymer
removal applications used in the semiconductor manufacturing
process. Designed to last two to three times longer than existing
filters, Fluorogard RS filters offer a lower cost of ownership. The
filters are available in a variety of retention ratings (0.05, 0.1
and 0.2 (mu)m) and in the following configurations: * Fluorogard
P-RS (Pre-Resist Stripping) -- PTFE pre-filter used in conjunction
with the Fluorogard RS-T in non-ashing photoresist stripping *
Fluorogard RS-M (Resist Stripping Multi-membrane) -- compact PTFE
pre- filter/membrane filter combination for non-ashing photoresist
stripping * Fluorogard RS-T (Resist Stripping Thick) -- PTFE
membrane filter optimized for photoresist stripping and residue
removal after ashing About Altis Semiconductor Altis Semiconductor
is a French 8" wafer fab, which manufactures devices down to
0.13(mu)m. Altis is a joint venture between Infineon Technologies
and IBM Microelectronics. Altis Semiconductor was created in July
1999 as a 50/50 joint-venture between two major players in the
international semiconductor industry, Infineon Technologies and IBM
Microelectronics Division. Combining the strengths of two world
wide semiconductor companies, as well as drawing from their
complementary cultures, creates a highly dynamic and creative
company, specialized in the manufacturing of state of the art
electronic components. For more information visit
http://www.altissemiconductor.com/. About Mykrolis Mykrolis
Corporation, based in Billerica, Massachusetts, is a worldwide
developer, manufacturer and supplier of liquid and gas delivery
systems, components and consumables used to precisely measure,
deliver, control and purify the process liquids, gases and
chemicals, as well as the deionized water, photoresists and vacuum
systems utilized in the semiconductor manufacturing process. In
addition, the Company's products are used to manufacture a range of
other products, such as flat panel displays, high purity chemicals,
photoresists, solar cells, gas lasers, optical disks and fiber
optic cables. Mykrolis is formerly Millipore Microelectronics, Inc.
For more information, visit http://www.mykrolis.com/. Fluorogard
and Mykrolis are registered trademarks of Mykrolis Corporation.
PRESS CONTACT: Craig B. Lazinsky Mykrolis Corporation Tel. +01
978-436-6743 DATASOURCE: Mykrolis Corporation CONTACT: Craig B.
Lazinsky of Mykrolis Corporation, +1-978-436-6743, Web site:
http://www.mykrolis.com/
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