Mykrolis Introduces New Planarcore(TM) PVA Brushes for Enhanced Post-CMP Wafer Cleaning and Polishing
30 June 2004 - 11:30PM
PR Newswire (US)
Mykrolis Introduces New Planarcore(TM) PVA Brushes for Enhanced
Post-CMP Wafer Cleaning and Polishing Innovative integrally molded
design of polyvinyl acetal (PVA) brushes ensures consistency and
process stability BILLERICA, Mass., June 30 /PRNewswire-FirstCall/
-- Mykrolis Corporation (NYSE:MYK), a leading supplier of
components and subsystems to the semiconductor industry, today
announced the release of its new Planarcore(TM) polyvinyl acetal
(PVA) brushes. Due to their unique, patent-pending "integrally
molded" design, Mykrolis Planarcore PVA brushes provide greater
consistency and improved performance in post-CMP cleaning and
polishing applications. Unlike traditional PVA products that are
friction-fitted to a core, Mykrolis Planarcore PVA brushes feature
PVA anchored to an integral brush core. This innovative design
provides dimensional stability and core flow equalization and
ensures that concentricity is not lost during use. As a result of
these benefits and the high purity of PVA, particle counts on
wafers are significantly reduced. "With our new Planarcore PVA
brushes, Mykrolis offers the most advanced technology for wafer
cleaning and polishing," said Christopher Wargo, director of the
CMP business at Mykrolis. "Our proprietary design achieves absolute
consistency from brush to brush, giving our customers greater
control and reliability. The integral core design also facilitates
rapid installation, another key consideration since tool uptime in
a fab is critical to productivity and throughput. We already have
several key customers using the Planarcore product, and the results
so far have been very positive. We expect much wider usage with the
official product launch." Mykrolis's new Planarcore PVA brushes
will be on display at SEMICON West, booth #726, in San Francisco
from July 12 to 14, 2004. About Mykrolis Mykrolis is a worldwide
developer, manufacturer and supplier of liquid and gas delivery
systems, components and consumables used to precisely measure,
deliver, control and purify the process liquids, gases and
chemicals, as well as the deionized water, photoresists and vacuum
systems utilized in the semiconductor manufacturing process. In
addition, the Company's products are used to manufacture a range of
other products, such as flat panel displays, high purity chemicals,
photoresists, solar cells, gas lasers, optical disks and fiber
optic cables. Based in Billerica, Massachusetts, Mykrolis is
formerly Millipore Microelectronics, Inc. The Company acquired
certain assets of Aeronex Corporation in October 2003. For more
information, visit http://www.mykrolis.com/. Mykrolis is a
registered trademark of Mykrolis Corporation. Planarcore is a
trademark of Mykrolis Corp. CONTACT: Craig Lazinsky Mykrolis
Corporation Tel. 978-436-6500 DATASOURCE: Mykrolis Corporation
CONTACT: Craig Lazinsky of Mykrolis Corporation, +1-978-436-6500,
Web site: http://www.mykrolis.com/
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