Mykrolis Introduces IntelliFlow(R) 3XP Digital Mass Flow Controller at SEMICON West
07 July 2004 - 11:30PM
PR Newswire (US)
Mykrolis Introduces IntelliFlow(R) 3XP Digital Mass Flow Controller
at SEMICON West 3rd Generation of IntelliFlow Digital Mass Flow
Controller Delivers X-treme Performance Through Unique Integration
of Mykrolis Gas Delivery Core Technologies SAN FRANCISCO, SEMICON
West, July 7 /PRNewswire-FirstCall/ -- Mykrolis Corporation
(NYSE:MYK), a leading supplier of components and subsystems to the
semiconductor industry, will introduce its new IntelliFlow(R) 3XP
Digital Mass Flow Controller (MFC) at SEMICON West (Booth #726) in
San Francisco from July 12-14, 2004. IntelliFlow 3XP is Mykrolis's
3rd generation of IntelliFlow Digital MFCs and uniquely integrates
several Mykrolis gas delivery core technologies into a single,
modular solution for advanced semiconductor processing. IntelliFlow
3XP delivers extreme performance for key attributes such as
accuracy, response time, control range, pressure insensitivity, and
programmability to enable superior yield on next generation etch,
deposition and thermal processes. IntelliFlow 3XP also offers a
unique, modular solution by providing options for integrated
pressure transducers, displays, and UHP contamination control which
can lower gas system cost and size while simultaneously improving
quality, simplifying maintenance, and increasing tool uptime.
IntelliFlow 3XP will continue to incorporate industry leading
IntelliFlow software for user configurable gases and ranges,
diagnostics, and graphical user interfaces. According to Bill
Culwell, product manager at Mykrolis Corp., "IntelliFlow 3XP offers
the latest in state of the art technology available for gas flow
control. Its unique combination of extreme performance, integrated
technology, and superior user configurable and diagnostic software
provides customers the ultimate capability for improving IC
processing, tool uptime, and cost of ownership. About Mykrolis
Mykrolis Corporation, based in Billerica, Massachusetts, is a
worldwide developer, manufacturer and supplier of liquid and gas
delivery systems, components and consumables used to precisely
measure, deliver, control and purify the process liquids, gases and
chemicals, as well as the deionized water, photoresists and vacuum
systems utilized in the semiconductor manufacturing process. In
addition, the Company's products are used to manufacture a range of
other products, such as flat panel displays, high purity chemicals,
photoresists, solar cells, gas lasers, optical disks and fiber
optic cables. Mykrolis acquired the assets of Aeronex Corporation
in October 2003. Mykrolis is formerly Millipore Microelectronics,
Inc. For more information, visit http://www.mykrolis.com/.
IntelliFlow and Mykrolis are registered trademarks of Mykrolis
Corporation. Press Contact: Craig B. Lazinsky Mykrolis Corporation
Tel. +01 978-436-6743 DATASOURCE: Mykrolis Corporation CONTACT:
Craig B. Lazinsky, Mykrolis Corporation, +01 978-436-6743, Web
site: http://www.mykrolis.com/
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