Bruker Introduces Dimension Edge PSS Atomic Force Microscope for Advanced HB-LED Production Metrology
15 August 2011 - 9:00PM
Business Wire
Bruker today launched the Dimension EdgeTM PSS
Atomic Force Microscope (AFM), a production-environment AFM
specifically tailored for patterned sapphire substrate (PSS)
metrology in high brightness light-emitting diode (HB-LED)
manufacturing. The Dimension Edge PSS is an easy-to-operate
AFM that delivers resolution far beyond traditional optical
techniques while at the same time providing precise 3D profile
information to control the most advanced PSS processes. The system
performs automated measurement, data collection, data analysis and
report generation on 2- to 6-inch wafers for production metrology
applications, and offers a multitude of AFM capabilities essential
for LED R&D. The Dimension Edge PSS comes with Bruker’s
exclusive AutoMETTM software package, which greatly improves
manufacturing productivity by fully automating AFM data collection
and analysis report generation to provide a PASS/FAIL output for
technician operation.
“Driven by ever increasing performance and cost demands, HB-LED
manufacturers are looking to PSS technology to deliver critical
process improvements, and the Dimension Edge PSS is
instrumental in controlling these advanced processes,” said Mark R.
Munch, Ph.D., President of the Bruker Nano Surfaces Division. “The
Dimension Edge PSS provides rapid process feedback with its
speed of measurement and unmatched precision and resolution.”
“With the release of the Dimension Edge PSS, Bruker
continues to demonstrate its commitment to superior AFM performance
and usability for both researchers and production environments,”
added David V. Rossi, Vice President and General Manager of
Bruker’s AFM Business. “The Dimension Edge PSS brings
reliable AFM metrology into industrial applications, enabling the
highest resolution measurements, and providing simple pass or fail
measurement criteria for operator ease of use.”
About Dimension Edge PSS
The Dimension Edge PSS system utilizes the strengths of
the Dimension Edge AFM along with proprietary software to provide a
turnkey production metrology solution for patterned sapphire
substrate manufactures. These features combine to allow for
technician level operation and a system ideal for production
environments. Bruker’s automation software package is designed
specifically to meet the production needs of HB-LED manufactures.
The software can easily be configured to measure between one to
nine wafers at multiple points per wafer, including automated data
analysis and reporting, providing measurement details to the
engineer and a PASS/FAIL indicator to the operator.
About Bruker Corporation (NASDAQ: BRKR)
Bruker Corporation is a leading provider of high-performance
scientific instruments and solutions for molecular and materials
research, as well as for industrial and applied analysis. For more
information about Bruker Corporation, please visit
www.bruker.com.
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