Advanced Energy’s New Power Meter Improves Accuracy and Performance in Precision RF Power Applications
08 December 2021 - 10:00PM
Business Wire
Integrating power sensor and meter into a single easy-to-use
instrument, the new RF power meter simplifies monitoring and
enables precise control
Advanced Energy (Nasdaq: AEIS) – a global leader in highly
engineered, precision power conversion, measurement and control
solutions – today announced the GEMINI™ 5540A RF (Radio Frequency)
power meter. The new power meter delivers highly accurate in-line
RF power measurement in a flexible and convenient integrated unit
for applications requiring precision RF power control in
semiconductor, communication, industrial and medical markets. As
the leader in RF power solutions in the semiconductor industry,
Advanced Energy continues to bring new capabilities for improving
plasma power controls and performance of advanced etch and
deposition processes.
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Integrating power sensor and meter into a
single easy-to-use instrument, the new RF power meter simplifies
monitoring and enables precise control. (Photo: Business Wire)
Combining sensor and meter capability into a single, easy-to-use
instrument, the GEMINI 5540A measures at frequencies from 0.2 to
200 MHz and powers from 3 to 5,000 W with 2-sigma accuracy of ±0.5%
+ 0.5 W. This integrated instrument enables users to replace
multiple instruments with a single meter for applications that
require precise measurement and control of RF power.
“In demanding semiconductor processes such as high aspect ratio
(HAR) plasma etch, precise control and chamber-to-chamber matching
of the RF system directly impact process performance,” said Gerry
Blumenstock, vice president, critical sensing and control products
at Advanced Energy. “With the new GEMINI 5540A, OEMs can accurately
calibrate the system and monitor RF power in real time, improving
the fidelity and consistency of leading-edge plasma-based
processes.”
The GEMINI 5540A incorporates a large, easy-to-read OLED digital
display that simultaneously shows forward and reverse power,
voltage standing wave ratio (VSWR) and frequency. It automatically
senses frequency with no reconfiguration required for forward and
reverse power measurements. The meter reduces calibration to every
12 months, compared to six months for conventional instruments. It
operates with a 5 V, 500 mA input supplied via a standard USB 2.0
port using either an external battery or AC power outlet and
off-the-shelf USB adapter.
In addition to taking measurements directly, the meter can also
be connected to a PC for collection, storage and audit of data
using Advanced Energy’s GEMINI Tools data visualization
software.
For detailed product information and technical specifications,
visit
www.tegam.com/shop/rf-microwave/power-meters/no-product/gemini-5540a-rf-power-meter
The GEMINI 5540A is showcased at AE’s booth 834 at SEMICON West
2021 alongside other solutions for semiconductor manufacturing,
including AE’s fast, accurate and reliable match networks. SEMICON
West 2021 takes place December 7-9 at the Moscone Center in San
Francisco, CA.
About Advanced Energy Advanced Energy (Nasdaq: AEIS) is a
global leader in the design and manufacturing of highly engineered,
precision power conversion, measurement and control solutions for
mission-critical applications and processes. AE’s power solutions
enable customer innovation in complex applications for a wide range
of industries including semiconductor equipment, industrial,
manufacturing, telecommunications, data center computing and
healthcare. With engineering know-how and responsive service and
support around the globe, the company builds collaborative
partnerships to meet technology advances, propel growth for its
customers and innovate the future of power. Advanced Energy has
devoted four decades to perfecting power for its global customers
and is headquartered in Denver, Colorado, USA. For more
information, visit www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance.
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Simon Flatt/Emma Jenkins Grand Bridges Marketing Limited
aei@grandbridges.com +1 310 529 0321
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