Mykrolis Introduces New High Flow Diffuser for Flat Panel and 300 mm Tools
12 July 2004 - 11:30PM
PR Newswire (US)
Mykrolis Introduces New High Flow Diffuser for Flat Panel and 300
mm Tools Specifically Designed for High Volume Throughput &
Easily Customized BILLERICA, Mass., July 12 /PRNewswire-FirstCall/
-- Mykrolis Corporation (NYSE:MYK), a leading supplier of
components and subsystems to the semiconductor industry, will
introduce the latest addition to the Chambergard(TM) Diffuser
product line, the BGN High-Flow Diffuser, at SEMICON West (Booth#
726) from July 12-14, 2004. This new diffuser is specifically
designed for use in high-flow applications such as load locks used
for Flat Panel Display (FPD) and 300 mm tools. The Chambergard BGN
Diffuser utilizes Mykrolis's patented nickel filter element to
quickly disperse the flow of incoming gas, allowing the load lock
chamber to fill at a higher rate without particle disturbance or
excessive turbulence. The BGN removes submicron particle
contamination from incoming gas and rapidly vents to the
atmosphere, thereby decreasing cycle time. Its advanced technology
allows FPD and 300 mm tool customers to retrofit the diffuser to
work with their existing tool or have it built to order. "Until
now, delivering large volumes of gas quickly to FPD and 300 mm
tools was a challenge," says Robert Zeller, gas filtration product
manager at Mykrolis, "Chambergard BGN is purposely designed to meet
the needs of these customers. The large size gives them greater
efficiency and decreases chamber vent time needed to meet their
process objectives." About Mykrolis Mykrolis Corporation, based in
Billerica, Massachusetts, is a worldwide developer, manufacturer
and supplier of liquid and gas delivery systems, components and
consumables used to precisely measure, deliver, control and purify
the process liquids, gases and chemicals, as well as the deionized
water, photoresists and vacuum systems utilized in the
semiconductor manufacturing process. In addition, the Company's
products are used to manufacture a range of other products, such as
flat panel displays, high purity chemicals, photoresists, solar
cells, gas lasers, optical disks and fiber optic cables. Mykrolis
acquired the assets of Aeronex Corporation in October 2003.
Mykrolis is formerly Millipore Microelectronics, Inc. For more
information, visit http://www.mykrolis.com/. Mykrolis is a
registered trademark of Mykrolis. Chambergard and the Mykrolis logo
are trademarks of Mykrolis Corporation. CONTACT: Craig Lazinsky
Mykrolis Corporation Tel. 978-436-6500 DATASOURCE: Mykrolis
Corporation CONTACT: Craig Lazinsky of Mykrolis Corporation,
+1-978-436-6500, Web site: http://www.mykrolis.com/
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