BEVERLY,
Mass., Dec. 12, 2023 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling
ion implantation solutions for the semiconductor industry, today
announced shipment of multiple Purion H SiC Power Series™ and the
Purion M SiC Power Series™ ion implanter systems to leading power
device chipmakers in Europe and
Asia, and the closure of an Purion
H200 SiC Power Series™ evaluation tool in Europe. Shipments include both evaluation and
revenue systems and will be used in high volume production of power
devices supporting automotive industry electric vehicle (EV)
applications.
President and CEO of Axcelis Technologies Russell Low commented,
"The power device market continues to grow rapidly and is a major
driver of our growth globally. We are pleased to continue to
support our customers' fab capacity expansion and also excited
about the opportunity to support our new customers with our market
leading Purion Power Series ion implanters."
The Purion Power Series
Axcelis is the only implant
supplier in the industry to offer a comprehensive solution to our
power device manufacturing customers. The Purion Power
Series™ family is uniquely suited to excel at power device
applications due to its innovative platform that offers the
flexibility to handle multiple wafer sizes (150mm, 200mm and
300mm), various substrate types (SiC, Si IGBT, GaN, and GaAs
wafers) at various implant temperatures (cold, room temperature,
warm and hot). This is accomplished while delivering the industry's
highest throughput and capital efficiency. The Purion Power
Series™ covers the full ion implant market space with the
Purion H Purion Power Series™ for high current applications,
the Purion H200 Power Series™ for high current medium energy
applications, Purion M Power Series™ for medium current
applications and the Purion XE Power Series™ for high energy
applications.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for over 40 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.