Applied Materials AI(x) Platform Harnesses the Power of Big Data and AI to Accelerate Semiconductor Technology Breakthroughs ...
05 April 2021 - 9:30PM
Applied Materials, Inc. today announced AIx TM, an innovative
platform that accelerates the discovery, development and commercial
deployment of new chip technologies.
AIx, which stands for Actionable Insight Accelerator, enables
engineers to see into semiconductor processes in real-time, take
millions of measurements across wafers and individual chips, and
optimize thousands of process variables to improve semiconductor
performance, power, area-cost and time to market (PPACt). The AIx
platform works across all Applied Materials process equipment,
eBeam metrology systems and inspection systems and is extendable
from lab to fab. By providing engineers with the ability to
fingerprint innovative recipes during R&D, AIx accelerates
their transfer and ramp into high-volume manufacturing (HVM). AIx
is already in use today, improving the PPACt of both logic and
memory chips.
“Accelerating the ‘t’ in PPACt is the biggest value driver for
all the companies in our ecosystem,” said Prabu Raja, senior vice
president and general manager of the Semiconductor Products Group
at Applied Materials. “AIx connects all the capabilities of Applied
in new ways with the goal of cutting development time in half and
improving process windows by one third. We have been developing AIx
over the past three years to provide engineers with an entirely new
kind of toolkit to solve the increasingly complex challenges of our
industry.”
“AIx uses the power of big data and AI to give customers better
outcomes at every stage of the semiconductor technology lifecycle,
from R&D to ramp and HVM,” said Raman Achutharaman, group vice
president, Semiconductor Products Group at Applied Materials.
“Engineers have thousands of process variables to choose from, and
only a handful of elusive correlations provide the key to
optimizing recipes for world-class results. AIx identifies and
magnifies this actionable data, providing engineers with the
actionable insights needed to accelerate PPACt.”
“Once again, Applied Materials is adding real value to the
semiconductor industry with big data analytics in the form of its
AIx platform for the process engineering ecosystem,” said Dan
Hutcheson, CEO and chairman of VLSIresearch. “AIx moves beyond
the decades-old statistical process control methods based on linear
data streams to a new multidimensional world where data from 3D
images, in-situ metrology and sensors can be stacked and then
distilled into information that can be acted on. Applied’s AIx
is a new toolkit that promises to accelerate R&D, thereby
shortening time to results and ultimately time to money. I
expect AIx algorithms will be ported to production to control the
process with real-time chamber control.”
The AIx platform includes:
- ChamberAITM: New sensors and machine learning algorithms for
Applied Materials process chambers that provide engineers with
real-time analytics of variables including chemistry, energy,
pressure, temperature and duration.
- On-board metrology: Unique in-vacuum metrology that enables new
films to be measured as they are being deposited, with
angstrom-level precision.
- Inline metrology: Unique algorithms based on Applied eBeam
metrology which can provide a 100-fold increase in measurement
speed versus legacy approaches along with 50 percent higher
resolution. Engineers can obtain over one million 3D wafer
measurements per hour to make nanometer-scale assessments of how
miniscule changes in recipes affect on-chip devices and
structures.
- AppliedPROTM: Process Recipe Optimizer generates digital
process maps that help accelerate materials and recipe development,
reduce variability and widen process windows. AppliedPRO can be
used to optimize individual chambers and tools as well as
accelerate matching across a fleet of systems.
- Digital twins: The AIx platform includes digital twin models of
select Applied Materials chambers and systems that enable virtual
experiments which accelerate recipe development, improve matching
and ramp transfer, and optimize output and yield in high-volume
production.
- Computing: The AIx platform includes the computing resources
needed to store and analyze massive data using machine learning and
AI algorithms.
Applied Materials will share AIx case studies at its 2021
Investor Meeting on April 6 and at Master Class events scheduled
for May 5 and June 16, 2021.
About Applied MaterialsApplied Materials,
Inc. (Nasdaq: AMAT) is the leader in materials engineering
solutions used to produce virtually every new chip and advanced
display in the world. Our expertise in modifying materials at
atomic levels and on an industrial scale enables customers to
transform possibilities into reality. At Applied Materials,
our innovations make possible the technology shaping the future.
Learn more at www.appliedmaterials.com.
Contact:Ricky Gradwohl (editorial/media)
408.235.4676Michael Sullivan (financial community) 408.986.7977
A photo accompanying this announcement is available at
https://www.globenewswire.com/NewsRoom/AttachmentNg/3b8f218b-050a-461c-823b-3c8eb75b1975
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