Demonstrating In-Line capabilities of Spectral interferometry
and Raman Spectroscopy for advanced memory
applications
REHOVOT, Israel, Feb. 27,
2024 /PRNewswire/ -- Nova (Nasdaq: NVMI) today
announced that it will publish two co-authored papers with Samsung
R&D Center research at SPIE Advanced Lithography 2024. The
papers will be presented at the SPIE by Nova and Samsung, at the
Metrology, Inspection and Process Control conference.
The papers are a result of the continuous collaboration between
the companies that is driving numerous innovative joint development
programs to enhance advanced chip manufacturing. The papers
demonstrate multiple novel technologies Nova avails for advanced
process control by developing unique solutions to measure critical
parameters of interest on complex structures inside memory
arrays.
The first paper "Unique Spectral Interferometry Solutions for
Complex High Aspect Ratio 3D NAND Structures" demonstrates the
capabilities of spectral interferometry (SI) with vertical
traveling scatterometry algorithms (VTS) and AI capabilities to
solve challenges in complex high-aspect-ratio structures, such as
3D NAND. This is achieved by measuring complex layer
thicknesses of the multideck 3D structures directly from the VTS
signals, without modeling, while filtering information from the
underlayers. In addition, VTS and AI enable direct profiling of the
deep through-type cell metal contacts in the areas with nonperiodic
staircases and significant lateral variations.
The second paper, "On-Cell Thickness Monitoring of Chalcogenide
Alloy Layer using Spectral Interferometry, Raman Spectroscopy, and
Hybrid Machine Learning", introduces in addition to VTS
modeling, the use of inline Raman Spectroscopy. The Raman signals
corresponding to specific material bonds are converted to in-line
on-cell thickness and composition measurement of critical
chalcogenide material. It is demonstrated that Raman Spectroscopy
results enable modeless AI solutions with VTS spectra, as a
derivative of the solution's ability to measure material
properties.
"We are excited about the opportunity to collaborate with
Samsung R&D Center in introducing Nova's innovative
technologies," said Dr. Shay Wolfling, Chief Technology Officer of
Nova. "This collaboration enables us to evaluate, enhance and
expand the use cases of our inline Spectral Interferometry and
Raman technologies at critical process steps in the most advanced
and challenging memory architectures. This joint work has
demonstrated that through R&D collaboration with our customers,
we can introduce groundbreaking solutions that will enable fast
transition to high-volume manufacturing."
About Nova
Nova is a leading innovator and key provider of material,
optical and chemical metrology solutions for advanced process
control in semiconductor manufacturing. Nova delivers continuous
innovation by providing state-of-the-art, high-performance
metrology solutions for effective process control throughout the
semiconductor fabrication lifecycle. Nova's product portfolio,
which combines high-precision hardware and cutting-edge software,
provides its customers with deep insight into developing and
producing the most advanced semiconductor devices. Nova's unique
capability to deliver innovative solutions enables its customers to
improve performance, enhance product yields and accelerate time to
market. Nova acts as a partner to semiconductor manufacturers from
its offices worldwide. Additional information may be found on
Nova's website link - https://www.novami.com/.
Nova is traded on the Nasdaq and TASE, Nasdaq ticker symbol
NVMI.
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Litigation Reform Act of 1995 relating to future events or our
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matters discussed in this press release also involve risks and
uncertainties summarized under the heading "Risk Factors" in Nova's
Annual Report on Form 20-F for the year ended December 31, 2023, filed with the Securities and
Exchange Commission on February 20,
2024. These factors are updated from time to time through
the filing of reports and registration statements with the
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obligation to update the forward-looking information contained in
this press release.
Company Contact:
Dror David, Chief Financial
Officer
Tel: +972-73-229-5760
E-mail - investors@novami.com
Nova website link - https://www.novami.com/
Investor Relations Contact:
Miri Segal MS-IR LLC
Tel: +917-607-8654
E-mail - msegal@ms-ir.com
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SOURCE Nova