Sensera Further Expands Fabrication Capabilities with Dicing, Wafer Bonding and Electroplating Technologies
26 October 2018 - 4:47AM
Business Wire
Sensera Inc. (ASX: SE1), a leading
provider of MEMS devices and Internet of Things (IoT) solution
provider that delivers sensor-based products transforming real-time
data into meaningful information, action and value, is pleased to
announce it has acquired and qualified additional thin-film
processing equipment including a dicing saw, a wafer bonder and an
electroplating cell to meet the growing customer demand in this
segment.
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Sensera's Plating Bonding and Dicing
tools - matching our customers' needs and growth. Expanded
capabilities allow in-house packaged MEMS solutions. (Photo:
Business Wire)
"We are very pleased to be able to expand our production
capabilities, closely aligning ourselves with growing customer
demand. This new production equipment substantially broadens our
existing tool set and enables greater vertical integration and
process control," said Tim Stucchi, GM/COO of the Sensera
MicroDevices Division.
The new dicing saw operates in either fully-automatic or
semi-automatic mode for full wafer and custom cuts, featuring a
positional accuracy down to 1 μm and a cutting speed of 300 mm/sec.
It supports small pieces and allows for custom shaping of silicon,
sapphire, Pyrex, quartz, ceramics and metals.
Operating under high vacuum, precisely controlled temperature
and high-pressure conditions, the new wafer bonder facilitates
extremely demanding applications. Eutectic, thermal compressive,
adhesive and anodic bonding processes with a wafer alignment
accuracy of 2 μm have been smoothly integrated into Sensera's
qualified processes, thus enabling the company to offer many wafer
level packaging (WLP) solutions to its current and future customers
in multiple applications and market spaces:
- Microfluidic devices for bio-analysis,
medical research and drug development
- Pressure sensors for human implantable
surgical devices
- Precision accelerometer and gyroscope
devices for geo-positioning
- Micro-mirror devices for laser based
Automotive self-driving applications
The wafer bond chamber is configurable to process small coupons
(from ~10 mm2) and wafer diameters from 25 mm (1”) up to 200 mm
(8").
The electroplating cell is able to plate and electroform wafers
or discreet parts up to a size of 200 mm (8"). Typical applications
include MEMS, Integrated Circuits (IC) on silicon, gallium arsenide
and similar glass-type substrates. Sensera's qualified processes
achieve exceptionally low residual stress and enable tight
thickness uniformity control.
"To drive down cycle times, improve quality control and reduce
costs, our fab requires ongoing capability upgrades," stated Ralph
Schmitt, CEO of Sensera Inc. "Our objective here is to bring
previously outsourced processes back in-house and to expand our
internal capability to develop and produce complex MEMS products
and solutions. The new dicer, bonder and electroplating cell are
just some of the essential steps required to enable innovative
development programs and commercial volume customer shipments.”
About Sensera Limited (ASX: SE1)
Sensera is an Internet of Things (IoT) solution provider that
delivers sensor-based products transforming real-time data into
meaningful information, action and value. The company designs and
manufactures hardware and software across the vertical technology
spectrum from unique structures as MicroElectroMechanical Systems
(MEMS) and sensors, as well as wireless networked systems and
software that when combined, drive an entire IoT platform
solution.
Shares in Sensera Limited (ASX: SE1) are traded on the
Australian Securities Exchange (ASX). For more information, please
visit our website: www.sensera.com.
Any forward-looking statements in this announcement are not
guarantees of future performance and involve known and unknown
risks, uncertainties, assumptions and other important factors, many
of which are beyond the control of the Company, its directors and
management.
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version on businesswire.com: https://www.businesswire.com/news/home/20181025005852/en/
Sensera Inc.Ralph Schmitt, +1 978-606-2600Chief Executive
Officerinfo@sensera.comorTim Dohrmann, +61 468 420 846Investor
Relationstim@nwrcommunications.com.auorPress contactEmbedded
PRCynthia Hoye, + 1 408-858-2602ch@embedded-pr.com
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