SAN JOSE, Calif., July 10, 2018 /PRNewswire/
-- Intermolecular, Inc. (NASDAQ: IMI), the trusted partner for
advanced materials innovation, today announced a new defined ALD
(Atomic Layer Deposition) process of Tellurium (Te), allowing for
more efficient composition tuning for 3D crosspoint NVM selectors.
A paper on the use of ALD of elemental tellurium prepared by
Intermolecular's CTO organization will be presented at the ALD
Conference on Tuesday, July 31, 2018
at 4:30 p.m. at the Songdo Convensia
in Incheon, South Korea.
"Non-volatile memory (NVM) technologies such as resistive random
access memory (RRAM) or phase change memory (PCM) has shown the
potential in next generation data storage applications. NVM devices
need to be packed densely in memory arrays and require a selector
device and architecture with high areal density, making three
dimensional (3D) integration of both the memory and selector active
layers cost competitive and attractive," said Karl Littau, CTO of Intermolecular. "With our
defined process, for the first time, ALD of elemental tellurium can
be used to tune the composition to realize vertically integrated 3D
crosspoint memory."
NVM devices use a selector device, such as the ovonic threshold
switch (OTS), in series with the memory element to minimize
parasitic currents in the memory array. Intermolecular has
leveraged its accelerated High-Throughput Experimentation (HTE)
platform to rapidly develop a conformal elemental Te ALD process to
tune the composition in various OTS pertinent films.
Utilizing Intermolecular's innovative platform, a suitable
nucleation layer was identified and deployed to realize continuous,
conformal coatings of elemental Te on high aspect ratio test
structures.
Materials Innovation Resources:
ALD Brochure
https://intermolecular.com/wp-content/uploads/2018/07/IM_ALD_brochure.pdf
Ferroelectrics Brochure
https://intermolecular.com/wp-content/uploads/2018/06/IM_AFM__brochure.pdf
PVD Chalcogenides Brochure
https://intermolecular.com/wp-content/uploads/2018/06/IM_PVD__brochure.pdf
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About Intermolecular, Inc.
Intermolecular is the
trusted partner for advanced materials innovation.
Advanced materials are at the core of innovation in the
21st century for a wide range of industries
including semiconductors, consumer electronics, automotive and
aerospace. With its substantial materials expertise, accelerated
learning and experimentation platform and customer-driven
approach, Intermolecular has a decade of experience helping
leading companies accelerate materials innovation.
"Intermolecular" and the Intermolecular logo are registered
trademarks; all rights reserved. Learn more at
www.intermolecular.com or follow on Twitter at @IMIMaterials.
PRESS CONTACT:
Tanis Communications, Inc.
Amy McDowell, +1 650-422-3716
amy.mcdowell@taniscomm.com
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SOURCE Intermolecular, Inc.
